=LDR  00000nam  2200000   4500
=001  INLIS000000001254681
=005  20230818023813
=035  ##$$a 0010-0823000659
=007  ta
=008  230818################g##########0#eng##
=020  ##$$a 0-07-112744-5
=082  ##$$a 621.381
=084  ##$$a 621.381 MID p
=100   #$$a Middleman, Stanley
=245  1#$$a PROCESS ENGINEERING ANALYSIS IN SEMICONDUCTOR DEVICE FABRICATION /$c Stanley Middleman
=250  ##$$a Ed. 1
=260  ##$$a Singapore :$b McGraw-Hill,$c 1993
=300  ##$$a 774 hlm : $b ilustrasi ; $c 23x30 cm
=650  #4$$a Fisika